式光刻机英语怎么说

“式光刻机”对应的英文单词有：immersion lithography equipment ，一共1个，具体意思及用法如下：

immersion lithography equipment式光刻机

与式光刻机相关的短语

接近式光刻机proximity aligner;aligner proximity type

扫描投影式光刻机Scanning Projection Aligner;scan projection mask alignment system