化学机械抛光的英文单词

“化学机械抛光”对应的英文单词有：

chemically mechanical polishing

化学机械抛光法Chemical Mechanical Polishing;Chemicalmechanical polish

机械化学抛光machano chemical polishing

化学机械抛光液CMP Slurry

化学辅助机械抛光法CAMPP

等刻蚀、化学机械抛光RIE

化学机械抛光技术chemical mechanical polishing

化学机械抛光机chemical-mechanical polishing machine

而化学机械抛光Chemical MechanicalPolishing/Planarization

机械化学抛光加工mechano chemical polishing